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LAM RESEARCH Parts List

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4700 series - Metal Etch System
490 - PolySilicon Etch System
490 B - Autoetch
853-017410-003 - Assy. cable.LWR match,Pk det.
853-370871-002 Rev B - Voltage ntrolled Interface PCB
9600 Alliance A6 - Metal Etch System
9600 SE - Metal Etcher
DSS200 - CMP SCRUBBER
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