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LAM Parts List

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2300 - CHAMBER, 60 MHZ ETCH
4420 - Oxide Etcher
4520 - 4520
4528 - Oxide Etcher
4728 - ETCHER TUNGSTEN
580 - Oxide Etcher
9600 PTX ALLIANCE FRAME - 2 chamber strip, 2 chamber etch alliance frame
TCP 9600 - Metal etch
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