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TEGAL Parts List

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1511 - Plasma Etcher, Parts Only
400 - strip/asher/descum
411 - Plasma Barrel Stripper
800 series - Poly Etch
901e - Nitride Etcher
903e - etcher
915/965 - Photo resist Stripper
965 - Barrel Asher
T1612 - Metal Etcher
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