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ULVAC Parts List

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1011621 - PART
2020A - Oil Rotary Vacuum Pump
2KW - RF POWER SUPPLY
A2KH-25 - DC P/S arc preventor
C-30V - Cryo compresser
C10ES - CRYO MPRESSER
C2W - CRYO PUMP MPRESSOR
C2W-U - CRYO PUMP MPRESSOR
C2WU303 - Cryo Pump mpresser
C30 - Cryo Pump mpresser
C30MT - Cryo compressor
C30MVH - CRYO MPRESSER
CDP-6118 - P-CVD
CIH-3030 - Loadlock type plasma CVD
CPD-1114 - P-CVD
CPD-2000 - Loadlock type plasma CVD
CPD-6118 - Loadlock type P-CVD
CPD-6722 - LOADLOCK TYPEP-CVD
CRTM-5000 - Crystal Oscillation Type Deposition
CRTM-6000 - Crystal Oscillation TRype Deposition ntroller
CSE-1000 - ETCHER
CSE-1110 - Dry Etcher
CSE-2120 - ETCHER
CSW303 - CRYO PUMP MPRESSOR
D-330 - Oil Rotary Vacuum Pump
D-330K - Oil Rotary Systems
D-650 - Oil Rotary Vacuum
D-650DK - Oil rotary vacuum pump
D-650K - Oil rotary vacuum pump
D-950 - Oil Rotary Vacuum Pump
D-950DK - Oil rotary vacuum pump
D-95OD - OIL ROTARY VACUUM PUMP
D-960D - Oil Rotaty Vacuum Pump
D330DK - Oil Rotary Vacuum Pump
DA-120 - DIAPHRAGM VACUUM PUMP
DA-60S - Dry Pump
DCG-05C - DC power supply
DLMS-33 - He Leak Detector
DLMS55 - HE LEAK DETECTOR
E/B evaporator - Evaporator
EA-4583 - Evaporator
EBH-6 - Evaporator
EBS-10A - High Vacuum Evaporator
EBV-6DA - High Vacuum Cleaner
EBX-10D - Evaporator
EBX-6D - Evaporator
EBX-8C - High Vacuum Evaporator
EC-403 - OIL ROTAARY VACUUM PUMP
EC803 - Oil rotary Vacuum pump
EM301 - Pirini Gauge
EX-400-D06 - Evaporator
EX550-C10 - Evaporator
GI-D6 - Ionization Gauge
GI-M - Ionization Gauge
GI-TL3RY - IONIZATION VACUUM GAUGE
GM-1000 - Capacitance Manometer
GP-1100 - Pin Point Pirani Vacuum Gauge
GP1SRY - Pirani Gauge
HP-510C - EB Power Supply
IDZ-8000 - IMPLANTER
IM-200M - Implanter
IPB-450-VHS - Implanter
ISZ-7700 - Medium Current Implanter
LP-U1SW - L Tyoe Valve
MBS-010 - Machanical Booster Pump
MBX-30AC - Matching Box
MLH-6318 - Sputter
MLX-3000 - Sputter
NLD-6000 - Plasma Etcher
ON-BOARD8 - Cryo Pump
ONBOAD-8 - Cryo Pump
PBM-012CM - MECHANICAL BOOSTER PUMP
PDR-012 - MECHANICAL BOOSTER PUMP
PDR-090CH - DRY PUMP
PKS-030 - Oil rotary Vacuum pump
PKS-030 +PMB12C - Pumping set
PKS-070 - OIL ROTARY VACUUM PUMP
PMB-001C - Mechanical Booster Pump
PMB-001CM - Mechanical Booster pump
PMB-003 - MECHANICAL BOOSTER PUMP
PMB-003C - Mechanical Booster pump
PMB-003CM - MECHANICAL BOOSTER PUMP
PMB-006C - Mechanical Booster pump
PMB-006CM - Mechanical Booster Pump
PMB-012C - MECHANICAL BOOSTER PUMP
PMB-012CM - Mechanical Booster Pump
PMB-024CM - Mechanical Booster Pump
PTI-500M-013 - Turbo Molecular Pump ntroller
RF-50 - Rf Power Supply
RFS 10C - RF Power Supply
RFS-30C - High Density Ozonizer
RMD-200M - Etcher
SBH-2306RDE - Sputter
SBH-4215RD - SPUTTER
SBH-5218 - Sputtering system
SH-350 - Sputter
SH-550 CUSTOM - SPUTTER
SH-550-C-10 - Sputter
SH-550M-C12 - Sputter
SH-55OM-C12 - SPUTTER
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